The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2024

Filed:

Apr. 29, 2019
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Henning Aust, Mühltal, DE;

Timo Adler, Gernsheim, DE;

Clemens Pihan, Darmstadt, DE;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01F 7/02 (2006.01); C23C 14/50 (2006.01); C23C 14/56 (2006.01); C23C 16/458 (2006.01); C23C 16/54 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01F 7/0236 (2013.01); C23C 14/50 (2013.01); C23C 14/568 (2013.01); C23C 16/4587 (2013.01); C23C 16/54 (2013.01); H01L 21/67709 (2013.01); H01L 21/6776 (2013.01);
Abstract

A magnetic levitation system for transporting a carrier is described. The magnetic levitation system includes a base defining a transportation track, a carrier movable relative to the base along the transportation track, and a plurality of active magnetic bearings provided at the base and configured to face a guided structure of the carrier. The guided structure includes a first guided zone and a second guided zone configured to interact with the plurality of active magnetic bearings and a recessed zone. The recessed zone is arranged between the first guided zone and the second guided zone in a transport direction of the carrier and is recessed with respect to the first guided zone and the second guided zone.


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