The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Jan. 07, 2022
Applicant:
SK Siltron Co., Ltd., Gumi-si, KR;
Inventor:
Hyun Woo Park, Gumi-si, KR;
Assignee:
SK SILTRON CO., LTD., Gumi-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01N 21/95 (2006.01); G06N 5/022 (2023.01); G06T 3/00 (2006.01); G06T 7/11 (2017.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G01N 21/9505 (2013.01); G06N 5/022 (2013.01); G06T 3/00 (2013.01); G06T 7/11 (2017.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A method of evaluating quality of a wafer or an apparatus of evaluating quality of a wafer may include: performing a copper-haze evaluation on a piece of wafer or a single crystal ingot; collecting copper-haze map data and a copper-haze evaluation score based on a result of the copper-haze evaluation; training an artificial intelligence model based on the copper-haze map data and the copper-haze evaluation score; and performing crystal defect evaluation on the piece of the wafer or the single crystal ingot using the learned artificial intelligence model that outputs the copper-haze evaluation score when the copper-haze map data is input.