The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Jan. 08, 2021
Canon Kabushiki Kaisha, Tokyo, JP;
Takayuki Uozumi, Tokyo, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A displacement meter includes: a light source; an illumination optical system which forms a light intensity distribution at a predetermined position on an optical axis by using light from the light source such that a light intensity at a peripheral portion of the light intensity distribution is stronger than a light intensity at a center portion of the light intensity distribution; a light deflection portion which has an opening on the optical axis and a reflection part reflecting light of the light intensity distribution formed by the illumination optical system at the predetermined position; a first lens unit which collects light reflected by the reflection part and illuminates a measurement object; a sensor array which detects light reflected by the measurement object and passing through the opening of the light deflection portion through the first lens unit; and a measurement unit which detects a displacement of the measurement object by using outputs of the sensor array at different timings.