The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Oct. 25, 2022
Applicant:
Kitz Sct Corporation, Tokyo, JP;
Inventor:
Hajime Horiguchi, Ohta, JP;
Assignee:
KITZ SCT CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 7/17 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16K 7/17 (2013.01); H01L 21/67017 (2013.01);
Abstract
A valve for semiconductor manufacturing device is provided in which an excessive surface pressure to the valve seat is prevented to improve durability. The valve main body () has a duplexed structure in which, a load distributing member () is arranged in serial to the valve seat () inside of the opening/closing mechanism () of the valve main body () while a thrust produced by the opening/closing mechanism () is maintained, a fastening load required is received as being distributed to the valve seat () and the load distributing member ().