The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Dec. 24, 2020
Applicant:
Tokuyama Corporation, Shunan, JP;
Inventor:
Toru Nagashima, Shunan, JP;
Assignee:
TOKUYAMA CORPORATION, Shunan, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 29/40 (2006.01); C30B 25/20 (2006.01); C30B 33/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 29/403 (2013.01); C30B 25/20 (2013.01); C30B 33/00 (2013.01); H01L 21/02024 (2013.01); H01L 21/02389 (2013.01); H01L 21/0254 (2013.01);
Abstract
A group III nitride single crystal substrate comprises: a first main face; and a first back face opposite to the first main face, wherein an absolute value of a radius of curvature of the first main face of the substrate is 10 m or more; an absolute value of a radius of curvature of a crystal lattice plane at a center of the first main face of the substrate is 10 m or more; and a 1/1000 intensity width of an X-ray rocking curve of a low-incidence-angle face at the center of the first main face of the substrate is 1200 arcsec or less.