The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2024

Filed:

Dec. 12, 2019
Applicant:

Canon Tokki Corporation, Mitsuke, JP;

Inventors:

Shigeyuki Ogawa, Koza-gun, JP;

Takumi Shibata, Yokohama, JP;

Kenta Tsukamoto, Yokohama, JP;

Kazuo Akita, Tsukubamirai, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/50 (2006.01); B23Q 3/152 (2006.01); C23C 14/04 (2006.01); H10K 71/00 (2023.01);
U.S. Cl.
CPC ...
C23C 14/505 (2013.01); B23Q 3/152 (2013.01); C23C 14/042 (2013.01); H10K 71/00 (2023.02);
Abstract

A transport carrier includes a carrier body being able to hold a substrate that is a deposition target, by which the substrate is transported in a deposition apparatus while being held, wherein the carrier body includes magnetic chucking means which magnetically chucks a mask which shields a non-deposition region of the substrate through the substrate and holds the mask in a state in which the mask has come into contact with a film formation surface of the substrate.


Find Patent Forward Citations

Ogawa, Shigeyuki. (2024). Transport carrier, deposition apparatus, and electronic device manufacturing apparatus (U.S. Patent No. 12116664). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12116664

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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