The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2024

Filed:

Aug. 26, 2021
Applicant:

Yamaha Robotics Holdings Co., Ltd., Tokyo, JP;

Inventors:

Michael Kirkby, Tokyo, JP;

Ysmaldo Jose Landaez Garcia, Tokyo, JP;

Hiroshi Munakata, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 (2006.01); B08B 7/00 (2006.01); B08B 7/04 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B08B 3/12 (2013.01); B08B 7/0014 (2013.01); B08B 7/04 (2013.01); H01L 21/02079 (2013.01);
Abstract

An ultrasonic cleaning method of the invention includes: a cleaning liquid coating step (S), coating a cleaning liquid on a front surface of an electronic component held on a cleaning stage; a pealing step (S), irradiating the front surface of the electronic component coated with the cleaning liquid with ultrasonic waves from ultrasonic speakers installed to an acoustic head and peeling off a foreign matter attached to the front surface from the front surface; and an attracting step (S), concentrating the ultrasonic waves generated from the ultrasonic speakers at a gap between a casing and a holding surface of the cleaning stage to form a low pressure region whose pressure is lower than atmospheric pressure at a central lower part of the casing, and attracting the foreign matter peeled off from the front surface of the electronic component and the cleaning liquid coated on the front surface.


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