The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Dec. 27, 2021
Applicant:
Deviceeng Co. Ltd, Chungcheongnam-do, KR;
Inventor:
Taek Youb Lee, Chungcheongnam-do, KR;
Assignee:
DEVICEENG CO., LTD, Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/02 (2006.01); B05B 13/02 (2006.01); B08B 3/04 (2006.01);
U.S. Cl.
CPC ...
B08B 3/022 (2013.01); B05B 13/0228 (2013.01); B05B 13/0278 (2013.01); B08B 3/041 (2013.01);
Abstract
The present invention relates to a substrate treatment apparatus including: a substrate support assembly having a chuck base installed rotatably with a rotating shaft; a fluid supply unit for supplying treatment fluid to top of a substrate; and a back nozzle assembly disposed in a hollow portion formed on a central portion of the chuck base to dispense the treatment fluid to the underside of the substrate.
Quick Actions:
Lee, Taek. (2024). Substrate treatment apparatus having back nozzle assembly (U.S. Patent No. 12115562). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12115562
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile