The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 2024

Filed:

Nov. 13, 2019
Applicant:

Ngk Spark Plug Co., Ltd., Nagoya, JP;

Inventors:

Ryunosuke Sakamaki, Nagoya, JP;

Katsuya Takaoka, Nagoya, JP;

Hiroshi Watanabe, Nagoya, JP;

Assignee:

NITERRA CO., LTD., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/06 (2006.01); C04B 35/581 (2006.01); H01L 21/683 (2006.01); H05B 3/03 (2006.01); H05B 3/12 (2006.01); H05B 3/20 (2006.01); H05B 3/28 (2006.01); H05B 3/74 (2006.01);
U.S. Cl.
CPC ...
H05B 3/12 (2013.01); C04B 35/581 (2013.01); H05B 3/03 (2013.01); H05B 3/06 (2013.01); H05B 3/20 (2013.01); H05B 3/283 (2013.01); H05B 3/74 (2013.01); H01L 21/683 (2013.01); H05B 2203/016 (2013.01);
Abstract

A holding device including a ceramic member formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, and an electrically conductive electricity supply member in contact with the heating resistor element. The holding device holds an object on the surface of the ceramic member. In the holding device, at least a portion of the surface of the heating resistor element, excluding its contact surface for contact with the electricity supply member, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb. Also disclosed is a method of manufacturing the holding device.


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