The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Aug. 31, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Yusuke Kondo, Yokkaichi Mie, JP;
Soichi Yamazaki, Yokkaichi Mie, JP;
Assignee:
Kioxia Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); C23C 14/04 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01); H01J 37/32 (2006.01); H01L 21/311 (2006.01); H10B 69/00 (2023.01);
U.S. Cl.
CPC ...
H01L 21/31144 (2013.01); C23C 14/042 (2013.01); C23C 14/0605 (2013.01); C23C 14/34 (2013.01); H01J 37/32651 (2013.01); H10B 69/00 (2023.02); H01J 2237/332 (2013.01);
Abstract
A film forming apparatus includes an electrode, a target holder configured to hold a film forming target so as to face the electrode, and a masking shield holder configured to hold a masking shield between the electrode and the target holder. The masking shield includes a lattice portion having a plurality of openings therein and a frame portion supporting the lattice portion.