The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
May. 02, 2022
Applicant:
Picosun Oy, Espoo, FI;
Inventor:
Väinö Kilpi, Masala, FI;
Assignee:
PICOSUN OY, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32715 (2013.01); C23C 16/4409 (2013.01); C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/4586 (2013.01); H01J 37/32834 (2013.01); H01J 37/3288 (2013.01); H01J 37/32899 (2013.01); H01J 37/3222 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/332 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/334 (2013.01); H01J 2237/3341 (2013.01);
Abstract
A substrate processing apparatus (), comprising a reaction chamber (), an outer chamber () at least partly surrounding the reaction chamber () and forming an intermediate volume () therebetween, and a substrate support () within the reaction chamber (), comprising a hollow inner volume (), wherein the hollow inner volume () and the intermediate volume () are in fluid communication through a channel () extending from the hollow inner volume () to the intermediate volume ().