The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Sep. 18, 2019
Jiangsu Leuven Instruments Co. Ltd, Xuzhou, CN;
Na Li, Xuzhou, CN;
Shiran Cheng, Xuzhou, CN;
Haiyang Liu, Xuzhou, CN;
Zhaochao Chen, Xuzhou, CN;
Yonggang Hou, Xuzhou, CN;
Chengyi Wang, Xuzhou, CN;
Dongdong Hu, Xuzhou, CN;
Kaidong Xu, Xuzhou, CN;
JIANGSU LEUVEN INSTRUMENTS CO. LTD, Xuzhou, CN;
Abstract
A reaction chamber lining including an annular side wall and a flange arranged on an upper portion of the side wall. An end face of the flange extends from the side wall in a radial direction, an outer edge of the flange extends in the radial direction to form fixing flanging parts, and a hole is in each of the fixing flanging parts. The side wall includes a rectangular slot, and a position of the rectangular slot corresponds to a position of a robotic arm access hole in a side wall of a reaction chamber. The side wall includes through holes and honeycomb-shaped apertures. A face joined to the bottom of the side wall includes a disc extending inwards in the radial direction, an extending end of the disc is fitted with an outer edge of an electrode assembly. A plurality of circles of slotted holes are in the disc.