The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
May. 27, 2022
Beijing Sevenstar Flow Co., Ltd., Beijing, CN;
BEIJING SEVENSTAR FLOW CO., LTD., Beijing, CN;
Abstract
A mass flow controller includes control module, fluid passage, flow regulating valve, flow sensor disposed between inlet and flow regulating valve, and pressure sensor disposed at outlet. The control module is configured to enter pressure feedback regulation mode when variation amount of target flow value exceeds preset threshold, and enter flow feedback regulation mode after fluid flow value detected by flow sensor meets first stabilization condition. The control module is configured to, in pressure feedback regulation mode, perform calculation according to fluid pressure value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount. The control module is also configured to, in flow feedback regulation mode, perform calculation according to fluid flow value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount.