The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Feb. 10, 2021
Applicant:
Edwards Limited, Burgess Hill, GB;
Inventors:
Nigel Paul Schofield, Burgess Hill, GB;
Stephen Dowdeswell, Burgess Hill, GB;
Assignee:
Edwards Limited, Burgess Hill, GB;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D 19/04 (2006.01); F04D 29/32 (2006.01); F04D 29/38 (2006.01); F04D 29/54 (2006.01);
U.S. Cl.
CPC ...
F04D 19/048 (2013.01); F04D 29/32 (2013.01); F04D 29/38 (2013.01); F04D 29/542 (2013.01);
Abstract
An axial flow vacuum pump for evacuating a chamber in a semiconductor manufacturing process comprises a rotor having a plurality of rotor blades and a stator having a plurality of stator blades, wherein the rotor blades and stator blades have a curved shape.