The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2024

Filed:

Apr. 13, 2021
Applicant:

Guangdong University of Technology, Guangdong, CN;

Inventors:

Jian Gao, Guangdong, CN;

Wenxiu Lai, Guangdong, CN;

Guocong Chen, Guangdong, CN;

Lanyu Zhang, Guangdong, CN;

Yachao Liu, Guangdong, CN;

Yongbin Zhong, Guangdong, CN;

Yuheng Luo, Guangdong, CN;

Huawen Lin, Guangdong, CN;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/68 (2006.01); H01L 25/075 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68764 (2013.01); H01L 21/68 (2013.01); H01L 21/68757 (2013.01); H01L 25/0753 (2013.01);
Abstract

A decoupled XY parallel micro-positioning stage, including a central moving platform, fixed mechanisms, bridge-type micro-displacement amplification mechanisms, a four-bar symmetrical flexible guide mechanism and a piezoelectric ceramic. Each fixed mechanism is arranged between adjacent amplification mechanisms and is symmetrical about X and Y axes centered on the moving platform. The amplification mechanism is symmetrically arranged with respect to the X and Y axes, and includes two first and second longitudinal beams and multiple crossbeams. The two first longitudinal beams are provided in parallel and spaced apart. The two second longitudinal beams are arranged spaced apart between the two first longitudinal beams, and are connected to the two first longitudinal beams via the crossbeams. The crossbeams are connected to the longitudinal beams via a flexible hinge. The piezoelectric ceramic is arranged between the two first longitudinal beams.


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