The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Jun. 24, 2021
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Masaki Inaba, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B65G 47/90 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67207 (2013.01); B65G 47/90 (2013.01); H01L 21/6704 (2013.01); H01L 21/67069 (2013.01); H01L 21/67167 (2013.01); H01L 21/67173 (2013.01); H01L 21/67184 (2013.01); H01L 21/68707 (2013.01);
Abstract
A substrate processing device is a device continuously performing wet processing and dry processing. The substrate processing device includes a plurality of processing modules. Each of the plurality of processing modules includes a single wet processing unit performing wet processing on a substrate; a single dry processing unit performing dry processing on a substrate; and a single transfer unit located between the wet processing unit and the dry processing unit to transfer a substrate between the wet processing unit and the dry processing unit.