The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Feb. 11, 2022
University-industry Cooperation Group of Kyung Hee University, Yongin-si, KR;
Jin Gyun Kim, Suwon-si, KR;
Chang Uk Ahn, Suwon-si, KR;
Ji Won Lee, Jeonju-si, KR;
In Chan Beck, Suwon-si, KR;
Do Hyeong Kwon, Suwon-si, KR;
UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY, Yongin-si, KR;
Abstract
An apparatus for controlling temperature uniformity of the disclosure includes a heater to supply a heat source to a substrate, a temperature sensor to generate temperature data of the substrate, a heating controller to present a distribution of a heat source based on the temperature data, and a heat source-electricity converter to calculate an amount of electricity to generate a heat source based on the distribution of a heat source and to supply the calculated amount of electricity to the heater. Since a method and an apparatus of the disclosure for controlling temperature uniformity uses a heat source and electricity having a linear relationship, problems of high costs and deterioration of an apparatus may be overcome that a typical method has to control an amount of electricity in a heater by temperature information.