The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Feb. 23, 2021
Applicant:
Edwards Vacuum Llc, Sanborn, NY (US);
Inventor:
Marcus Hans Robert Thierley, Shakopee, MN (US);
Assignee:
Edwards Vacuum LLC, Sanborn, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 41/20 (2006.01); H01J 41/06 (2006.01);
U.S. Cl.
CPC ...
H01J 41/20 (2013.01); H01J 41/06 (2013.01);
Abstract
Method for the regeneration of a volume getter pump in a vacuum apparatus with a volume getter pump and an ion getter pump where the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded for determination of the pressure in the vacuum apparatus and then a heating element of the NEG is controlled as a function of the current of the ion getter pump for the purpose of heating the NEG material.