The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2024

Filed:

Feb. 15, 2021
Applicant:

Tem Co., Ltd., Cheonan-si, KR;

Inventor:

Jin Kyung Park, Cheonan-si, KR;

Assignee:

TEM CO., LTD., Cheonan-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16B 39/12 (2006.01); F16B 39/26 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
F16B 39/12 (2013.01); F16B 39/26 (2013.01); H01J 37/3255 (2013.01); H01J 37/32568 (2013.01); H01J 2237/032 (2013.01);
Abstract

An interlocking fastening upper electrode assembly having an improved fastening force is proposed. The assembly is configured such that a bush inserted into a silicon electrode protrudes above the silicon electrode, and the protruding portion is inserted into and coupled to an anodizing plate so as to suppress rotation of the bush, the assembly including: an inner and outer tab composite nut coupled to an assembly groove of the silicon electrode and an anodizing plate so as to prevent rotation; an inner and outer tab nut assembled in the assembly groove of the silicon electrode and fitted to the outside of the inner and outer tab composite nut; and an assembly module coupled through the inside of a through part of the anodizing plate and assembled with the inner and outer tab composite nut in order to fix the anodizing plate provided above the silicon electrode.


Find Patent Forward Citations

Quick Actions:

Park, Jin. (2024). Interlocking fastening upper electrode assembly having improved fastening force, and plasma device including same (U.S. Patent No. 12104638). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12104638

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…