The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2024

Filed:

Feb. 05, 2019
Applicant:

Central Glass Company, Limited, Ube, JP;

Inventors:

Yuzo Okumura, Ube, JP;

Katsuya Kondo, Auderghem, BE;

Shuhei Yamada, Ube, JP;

Atsushi Ryokawa, Ichikawa, JP;

Yuki Fukui, Ube, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 3/00 (2006.01); C09K 3/18 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
C09K 3/18 (2013.01); H01L 21/304 (2013.01); H01L 21/306 (2013.01);
Abstract

The present invention is directed to a liquid chemical for forming a water-repellent protective film on a silicon element-containing wafer surface, a method of preparing the liquid chemical and a method of manufacturing a surface-treated body with the use of the liquid chemical, wherein the liquid chemical includes the following components: (I) a silylation agent; (II) at least one kind of nitrogen-containing compound selected from the group consisting of those of the following general formulas [1] and [2]; and (III) an organic solvent.


Find Patent Forward Citations

Loading…