The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Mar. 21, 2022
Inficon Ag, Balzers, LI;
Bernhard Andreaus, Rapperswil, CH;
Astrid Waldner, Bad Ragaz, CH;
INFICON AG, Balzers, LI;
Abstract
A vacuum feedthrough () which is constructed in radial layers comprises the following elements (from inwards to outwards): —a lens element (), —a first ring () made of glass, —a first hollow cylinder () made of a first dielectric material, —a first electrically conductive layer (), —a second hollow cylinder () made of glass, —a third hollow cylinder () made of ceramic, —a second ring made of glass (), and—a frame () made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.