The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Sep. 11, 2020
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Patrick Turner, San Bruno, CA (US);
Carolyn Bianco, San Francisco, CA (US);
Charles Chung, San Francisco, CA (US);
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Abstract
Methods of fabricating acoustic devices are disclosed. A lateral etch stop is formed in a substrate. A back surface of a piezoelectric plate is attached to a front surface of the substrate. A conductor pattern is formed on the front surface of the piezoelectric plate, the conductor pattern including interleaved fingers of an interdigital transducer (IDT). A cavity is etched in the substrate using an etchant introduced through one or more openings in the piezoelectric plate. A lateral extent of the cavity is defined by the lateral etch stop. After etching the cavity, a portion of the piezoelectric plate forms a diaphragm spanning the cavity with the interleaved fingers of the IDT disposed on the diaphragm.