The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Jul. 22, 2021
Applicant:
Gudeng Precision Industrial Co., Ltd, New Taipei, TW;
Inventors:
Assignee:
Gudeng Precision Industrial Co., Ltd, New Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); G03F 1/66 (2012.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67359 (2013.01); G03F 1/66 (2013.01); G03F 7/70733 (2013.01); G03F 7/70741 (2013.01); H01L 21/67353 (2013.01); H01L 21/67369 (2013.01); H01L 21/67386 (2013.01);
Abstract
A method for containing a reticle in a pod is provided. The method includes opening the pod such that a pressing element retained movably on the pod by a limiting cap moves to a first position, wherein a shoulder part of the pressing element between a pressure receiving part and a pressing part of the pressing element is spaced from the limiting cap. The method further includes placing the reticle in the pod such that the reticle is pressed by the pressing element.