The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2024

Filed:

Aug. 31, 2020
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Hiroshi Ohno, Tokyo, JP;

Takashi Usui, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01B 11/14 (2006.01); G01B 11/24 (2006.01); G01N 21/41 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01B 11/14 (2013.01); G01B 11/24 (2013.01); G01N 21/41 (2013.01); G01N 21/4133 (2013.01); G01N 21/47 (2013.01);
Abstract

An optical inspection deviceA includes a light selection unit, a detection element, and a first image formation element. The light selection unithas the plurality of wavelength selection regionsthat selectively transmits or reflects the light rays L of mutually different wavelength regions. The detection elementdetects scattering characteristic information of the light rays L having reached the light receiving surfacevia the light selection unit. The first image formation elementcauses scattered light scattered by a subject S to enter a light receiving surfacevia the light selection unit. The plurality of wavelength selection regionshas different azimuth angles with respect to the optical axis z of the first image formation element


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