The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Jan. 03, 2020
Presys.co., Ltd, Gyeonggi-do, KR;
Sang Min Kim, Gyeonggi-do, KR;
Jae Min Lee, Gyeonggi-do, KR;
PRESYS.CO., LTD, Gyeonggi-do, KR;
Abstract
A valve module provided to a substrate processing device including: a process chamber defining a substrate processing space; and a flow path portion coupled to the process chamber and forming a flow path along which a gas activated by plasma flows, the valve module including: a shut-off plate disposed in the flow path to move forwards or rearwards across the flow path through an open slit formed at one side of the flow path portion in order to open or close the flow path; a first driver driving forward or backward movement of the shut-off plate; a shut-off plate-protecting portion moving into a gap between the shut-off plate and the flow path to prevent the shut-off plate from being damaged by the activated gas when the shut-off plate is moved backwards to open the flow path; and a second driver driving movement of the shut-off plate-protecting portion.