The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2024

Filed:

Jan. 23, 2020
Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventor:

Takehiro Yoshida, Hitachi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/40 (2006.01); C30B 25/20 (2006.01); C30B 33/00 (2006.01); H01L 29/04 (2006.01); H01L 29/20 (2006.01); H01L 29/34 (2006.01);
U.S. Cl.
CPC ...
C30B 29/403 (2013.01); C30B 25/20 (2013.01); C30B 33/00 (2013.01); H01L 29/045 (2013.01); H01L 29/2003 (2013.01); H01L 29/34 (2013.01);
Abstract

A nitride semiconductor substrate that is constituted by a single crystal of a group III nitride semiconductor and includes a main surface for which the closest low index crystal plane is a (0001) plane includes an inclined interface growth region that has grown with inclined interfaces other than the (0001) plane serving as growth surfaces. A ratio of an area occupied by the inclined interface growth region in the main surface is 80% or more. When a dislocation density is determined based on a dark spot density by observing the main surface in a field of view that is 250 μm square using a multiphoton excitation microscope, the main surface does not include a region that has a dislocation density higher than 3×10cm, and the main surface includes dislocation-free regions that are 50 μm square and do not overlap each other, at a density of 100 regions/cmor more.


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