The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Oct. 29, 2018
Sumitomo Electric Industries, Ltd., Osaka, JP;
Kyoko Okita, Osaka, JP;
Tsubasa Honke, Osaka, JP;
Sumitomo Electric Industries, Ltd., Osaka, JP;
Abstract
A silicon carbide substrate according to the present disclosure is a silicon carbide substrate that includes a first main surface and a second main surface opposite to the first main surface, and is made of silicon carbide having a polytype of 4H. The first main surface has a maximum diameter of more than or equal to 140 mm. The first main surface is a {0001} plane or a plane inclined at an off angle of more than 0° and less than or equal to 8° relative to the {0001} plane. Half-widths of a peak corresponding to a folded mode of a longitudinal optical branch of a Raman spectrum of the silicon carbide substrate within a plane of the first main surface have an average value of less than 2.5 cm, and a standard deviation of less than or equal to 0.06 cm.