The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Dec. 24, 2021
Applicant:
Msway Technology Co., Ltd., Seoul, KR;
Inventors:
Min Soo Lee, Seoul, KR;
Jong Chun Park, Anyang-si, KR;
Assignee:
MSWAY Technology Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/28 (2006.01); C23C 14/02 (2006.01); C23C 14/20 (2006.01); C23C 14/34 (2006.01); G02B 5/20 (2006.01);
U.S. Cl.
CPC ...
C23C 14/024 (2013.01); C23C 14/205 (2013.01); C23C 14/34 (2013.01); G02B 5/208 (2013.01); G02B 5/282 (2013.01); G02B 5/285 (2013.01);
Abstract
A low-resistance conductive thin film is disclosed. The present invention provides a low-resistance conductive thin film including: a substrate; a first capping layer disposed on the substrate; a second capping layer disposed on the first capping layer; a metal layer disposed on the second capping layer; a third capping layer disposed on the metal layer; and a fourth capping layer disposed on the third capping layer.