The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Sep. 27, 2023
Jsw Aktina System Co., Ltd, Yokohama, JP;
JSW AKTINA SYSTEM CO., LTD, Yokohama, JP;
Abstract
A laser processing apparatus and a laser processing method that can effectively prevent a processing time for one semiconductor film from increasing are provided. A laser processing apparatus () according to an embodiment includes a laser light source () configured to irradiate a semiconductor film (M) with a laser beam, a film state measuring instrument () configured to measure a state of the semiconductor film after the semiconductor film (M) is irradiated with the laser beam, and a laser light adjusting mechanism configured to adjust a timing at which the semiconductor film (M) is irradiated with a next laser beam and intensity of the laser beam according to the state of the semiconductor film (M) measured by the film state measuring instrument ().