The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Mar. 31, 2021
Skyworks Global Pte. Ltd., Singapore, SG;
Kwang Jae Shin, Yongin, KR;
Jiansong Liu, Irvine, CA (US);
Jong Duk Han, Yongin, KR;
Jae Hyung Lee, Seoul, KR;
Yiliu Wang, Irvine, CA (US);
Yosuke Hamaoka, Suita, JP;
Alexandre Augusto Shirakawa, San Diego, CA (US);
Benfeng Zhang, Moriguchi, JP;
Skyworks Global Pte. Ltd., Singapore, SG;
Abstract
Aspects of this disclosure relate bulk acoustic wave resonators with a patterned mass loading layer at least contributing to a difference in mass loading between a main acoustically active region of the bulk acoustic wave resonator and a recessed frame region of the bulk acoustic wave resonator. Related methods of manufacturing can involve forming the patterned mass loading layer in the main acoustically active region and the recessed frame region in a common processing step such that the patterned mass loading layer has a higher density in the main acoustically active region than in the recessed frame region.