The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Oct. 12, 2021
Imec Vzw, Leuven, BE;
Katholieke Universiteit Leuven, Leuven, BE;
Antoine Pacco, Mechelen, BE;
Massimo Mongillo, Kessel-Lo, BE;
Anton Potocnik, Leuven, BE;
Danny Wan, Leuven, BE;
Jeroen Verjauw, Leuven, BE;
IMEC vzw, Leuven, BE;
Katholieke Universiteit Leuven, Leuven, BE;
Abstract
A method for forming a modified resonator is provided. In one aspect, the method includes obtaining a resonator on top of a substrate, thereby forming an interface area between a bottom surface of the resonator and a top surface of the substrate. The resonator can include niobium or tantalum. The method also includes contacting the resonator and the substrate with a liquid acidic etching solution selected so as to have a higher etch rate towards the substrate than towards the resonator and a nonzero etch rate towards the resonator.