The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Apr. 22, 2021
Gudeng Precision Industrial Co., Ltd., New Taipei, TW;
Ming-Chien Chiu, New Taipei, TW;
Chia-Ho Chuang, New Taipei, TW;
Yi-Hsuan Lee, New Taipei, TW;
Hsing-Min Wen, New Taipei, TW;
Hsin-Min Hsueh, New Taipei, TW;
GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei, TW;
Abstract
A reticle pod with antistatic capability includes a base and plural of support members. The base has a carrying surface having a recess formed thereon and defined by a bottom surface. The support members encircle the carrying surface of the base and are adapted to support a reticle. The recess is defined by a depth extending between the carrying surface and the bottom surface. The depth ranges from 300 μm to 3400 μm to thereby weaken the electrostatic force exerted upon particles on the carrying surface.