The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Apr. 08, 2022
Electronics and Telecommunications Research Institute, Daejeon, KR;
Kwang Hyo Chung, Daejeon, KR;
Chang Geun Ahn, Daejeon, KR;
Do Hyun Kim, Daejeon, KR;
Seung Hwan Kim, Daejeon, KR;
Hyung Wook Noh, Daejeon, KR;
Hwin Dol Park, Daejeon, KR;
Yong Won Jang, Daejeon, KR;
Jae Hun Choi, Daejeon, KR;
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon, KR;
Abstract
Provided is a multi-port gas flow rate control apparatus. The multi-port gas flow rate control apparatus includes a gas supply chamber configured to supply a measurement gas input through one gas inflow channel while allowing the measurement gas to diverge into a plurality of flows, a plurality of gas divergence flow channels each having one side connected to the gas supply chamber and configured to transfer the measurement gas flowing through the gas supply chamber to a plurality of gas sensors, respectively, and a gas measurement chamber configured to accommodate the plurality of gas sensors, including the plurality of gas divergence flow channels configured to connect to the gas supply chamber to the plurality of gas sensors to transfer a gas outflow diverging through the gas supply chamber to the plurality of accommodated gas sensors, and configured to discharge the gas outflow sensed by the plurality of gas sensors.