The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Mar. 09, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Akira Masuya, Tokyo, JP;
Tadao Yabuhara, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
A microscopic image capturing method includes: emitting a light beam from a light beam light source; detecting a spot image by a camera or a photodiode; focusing the spot image by an objective lens actuator moving an objective lens in the optical axis direction of the light beam with respect to a sample container; determining by a reflective surface identification unit whether the light beam has been applied to a defect on the basis of the spot image; when it is determined that the light beam has been applied to the defect, moving by an XY stage the sample container with respect to the objective lens in a direction orthogonal to the optical axis of the light beam in accordance with a prescribed condition; and, when the light beam has not been applied to the defect, capturing a microscopic image of a sample by using an illuminator.