The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Jun. 11, 2020
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Tetsuya Kosugi, Toyama, JP;
Masaaki Ueno, Toyama, JP;
Shinobu Sugiura, Toyama, JP;
Masashi Sugishita, Toyama, JP;
Assignee:
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27B 17/00 (2006.01); H01L 21/67 (2006.01); H05B 1/02 (2006.01); H05B 3/00 (2006.01);
U.S. Cl.
CPC ...
F27B 17/0025 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H05B 1/0233 (2013.01); H05B 3/0019 (2013.01); H05B 3/0047 (2013.01); H05B 2203/035 (2013.01); H05B 2203/037 (2013.01);
Abstract
There is provided a technique that includes: a heat generator installed for each of control zones and configured to raise an internal temperature of a reaction tube by heat generation; a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.