The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2024

Filed:

Mar. 02, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Zohreh Razavi Hesabi, Milpitas, CA (US);

Cong Trinh, Santa Clara, CA (US);

Kevin Griffin, Livermore, CA (US);

Alexander V. Garachtchenko, Mountain View, CA (US);

Kenric Choi, San Jose, CA (US);

Vipin Jose, San Jose, CA (US);

Saloni Sawalkar, Milpitas, CA (US);

Maribel Maldonado-Garcia, San Jose, CA (US);

Kendrick H. Chaney, Santa Clara, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 9/12 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); G01F 23/00 (2022.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/45544 (2013.01); G01F 23/0007 (2013.01); G05D 9/12 (2013.01); H01L 21/67253 (2013.01); H01L 22/10 (2013.01);
Abstract

An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.


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