The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Nov. 20, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Wayne State University, Detroit, MI (US);
Thomas Knisley, Livonia, MI (US);
Keenan N. Woods, San Ramon, CA (US);
Mark Saly, Santa Clara, CA (US);
Charles H. Winter, Bloomfield Hills, MI (US);
Stefan Cwik, Braintree, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Wayne State University, Detroit, MI (US);
Abstract
Halide ligand free rhenium complexes are described as well as methods for depositing rhenium-containing films. Some embodiments provide a rhenium complex with a general formula of OReO-M-R1R2R3, where M is a group IV element, R1 is selected from H, alkyl, alkenyl, alkynyl, an aromatic ring, or alkoxy, and R2 and R3 are each independently selected from H, alkyl, alkenyl, alkynyl, an aromatic ring, or alkoxy, or R2 and R3 join together to form a ring structure or an oxo group. Some embodiments provide a rhenium complex with a general formula of Re(NR')(NHR″), where R′ and R″ are independently selected from H, alkyl, alkenyl, alkynyl, or an aromatic ring.