IDiyas

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12082413 B1

PDFFull Text
Date of Patent:
Sep. 03, 2024

Filed:

Apr. 21, 2021

Vertical semiconductor memory device having stacked shifted axis channels

Applicant:

Kioxia Corporation, Tokyo, JP;

Inventor:

Toshiyuki Sasaki, Yokkaichi Mie, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:

Finnegan, Henderson, Farabow, Garrett & Dunner, LLP

Primary Examiner:

Tucker J Wright

Int. Cl.
CPC ...
H10B 43/27 (2023.01); G11C 16/10 (2006.01); H01L 21/311 (2006.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01); H01L 29/10 (2006.01); H01L 29/792 (2006.01); H10B 43/20 (2023.01); H10B 43/35 (2023.01); A45F 5/02 (2006.01); B24B 3/54 (2006.01); B26B 29/02 (2006.01);
U.S. Cl.
CPC ...
H10B 43/27 (2023.02); G11C 16/10 (2013.01); H01L 21/31116 (2013.01); H01L 23/528 (2013.01); H01L 23/53257 (2013.01); H01L 23/53261 (2013.01); H01L 29/1037 (2013.01); H01L 29/7926 (2013.01); H10B 43/20 (2023.02); H10B 43/35 (2023.02); A45F 5/021 (2013.01); B24B 3/54 (2013.01); B26B 29/025 (2013.01);
Abstract

According to one embodiment, the stacked body includes a plurality of stacked units and a first intermediate layer. Each of the stacked units includes a plurality of electrode layers and a plurality of insulating layers. Each of the insulating layers is provided between the electrode layers. The first intermediate layer is provided between the stacked units. The first intermediate layer is made of a material different from the electrode layers and the insulating layers. The plurality of columnar portions includes a channel body extending in a stacking direction of the stacked body to pierce the stacked body, and a charge storage film provided between the channel body and the electrode layers.

Find Patent Forward Citations

Loading…