The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
May. 18, 2022
Applicant:
Skyworks Solutions, Inc., Irvine, CA (US);
Inventor:
Siarhei Dmitrievich Barsukou, Takarazuka, JP;
Assignee:
Skyworks Solutions, Inc., Irvine, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 17/02 (2006.01); B81B 3/00 (2006.01); H03H 9/02 (2006.01); H03H 9/125 (2006.01); H03H 9/17 (2006.01); H04R 3/02 (2006.01); H04R 3/06 (2006.01); H04R 17/10 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H04R 17/02 (2013.01); B81B 3/0021 (2013.01); H04R 3/02 (2013.01); B81B 2201/0257 (2013.01); H03H 9/02244 (2013.01); H03H 9/125 (2013.01); H03H 9/17 (2013.01); H04R 3/06 (2013.01); H04R 17/10 (2013.01); H04R 31/00 (2013.01); H04R 2201/003 (2013.01);
Abstract
A piezoelectric MEMS microphone includes a substrate and a piezoelectric sensor movably coupled to the substrate. The piezoelectric sensor includes a multilayer cantilever beam with multiple piezoelectric layers and multiple metal electrode layers. The beam is attached to the substrate and extends to a distal tip at a free unsupported end. A feedback control circuit is electrically connected to one or more of the metal electrode layers and applies a direct current bias voltage between at least two of the metal electrode layers to actively control an acoustic resistance of the piezoelectric sensor.