The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2024

Filed:

Feb. 15, 2022
Applicant:

Nanya Technology Corporation, New Taipei, TW;

Inventor:

Kuo-Hui Su, Taipei, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/76 (2006.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01); H01L 29/423 (2006.01); H01L 29/51 (2006.01); H01L 21/768 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4236 (2013.01); H01L 23/5283 (2013.01); H01L 23/53238 (2013.01); H01L 29/513 (2013.01); H01L 29/518 (2013.01); H01L 21/76846 (2013.01); H01L 21/76858 (2013.01); H01L 21/76867 (2013.01); H01L 29/401 (2013.01);
Abstract

A recessed gate structure includes a recessed structure, wherein the recessed structure comprises a substrate with the recess extending into the substrate from a topmost surface of the substrate; a conductive feature, filled in the recess of the recessed structure; a first functional layer, extending between the conductive feature and the recessed structure, and comprising a first element; a second functional layer, extending between the first functional layer and the conductive feature, and comprising a second element; and an interfacial layer, extending along an interface between the first functional layer and the second functional layer, and comprising the first element and the second element.


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