The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Sep. 25, 2019
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/09 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/09 (2013.01); H01J 2237/026 (2013.01); H01J 2237/20 (2013.01);
Abstract
A performance of a sample holderused in a charged particle beam device is improved. A shield plateis connected to a sample stand. A sample standis provided with a pressing memberthat can move in a direction perpendicular to the shield platein a state in which the pressing member is attached to the sample stand, and has a bar shape. A sample supporting memberconnected to the pressing memberis provided at a position facing the shield plate. A springis provided along an outer circumference of the pressing memberand is connected to the sample supporting memberand the sample stand