The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Nov. 02, 2022
Renesas Electronics Corporation, Tokyo, JP;
Masaaki Tanimura, Tokyo, JP;
RENESAS ELECTRONICS CORPORATION, Tokyo, JP;
Abstract
A semiconductor device includes a temperature sensor circuit having a sensor element, internal circuits, sensor terminals connected to the sensor element, and normal terminals connected to the internal circuits. A semiconductor inspection apparatus inspects, by using a probe card having first probes and second probes, the semiconductor device mounted on a stage in a first state in which the first probe is in contact with the sensor terminal and the second probe is not in contact with the semiconductor device and in a second state in which the first probe is in contact with the sensor terminal and the second probe is in contact with the normal terminal. The semiconductor inspection apparatus measures an output value of the sensor element in the first state to calculate temperature characteristics of the sensor element, and grasps a temperature of the sensor element in the second state based on the temperature characteristics.