The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Oct. 16, 2018
Indian Institute of Science, Bangalore, IN;
Chandra Shekhar Prajapati, Bangalore, IN;
Navakanta Bhat, Bangalore, IN;
Indian Institute of Science, Bangalore Karnataka, IN;
Abstract
Methods of fabrication and nano-sensor and nano-sensor array thereof are provided. A sensing electrode assembly can be patterned on a sacrificial layer of a substrate. The sensing electrode assembly can comprise a pair of contact pads and an electrode element coupled to and disposed between the pair of contact pads. The sensing electrode assembly can be formed on the patterned sensing electrode assembly. The sacrificial layer below a portion of the electrode element can be removed to obtain a suspended electrode element. The suspended electrode element can be oxidized at a first predetermined temperature to obtain a pair of electromigrated regions and a notch portion between the pair of the electromigrated regions. The notch portion can be used to detect a gaseous component in an ambient gas at a second predetermined temperature.