The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Dec. 24, 2023
Harbin Institute of Technology, Harbin, CN;
HARBIN INSTITUTE OF TECHNOLOGY, Harbin, CN;
Abstract
An interferometric displacement measurement system and method based on phase modulation of polarized light of micro probe are provided. An electro-optic phase modulator is used to perform sinusoidal phase modulation on a light beam emitted by a semiconductor laser to obtain an adjusted light beam. The adjusted light beam is divided by a polarization beam splitter to generate a reference light beam and a measurement light beam. The two light beams are respectively reflected by a built-in reflection surface of a micro probe and a target mirror, and transmitted to a polarization-maintaining fiber circulator. The reference light beam interferes with the measurement light beam at a fiber optic polarization element to generate an interference light signal. A photodetector converts the interference light signal into an interference electrical signal, and the interference electrical signal is demodulated by a signal demodulator to obtain a displacement value of the target mirror.