The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Mar. 28, 2019
Applicant:
Ovivo Inc., Montreal, CA;
Inventors:
Assignee:
Ovivo Inc., Montreal, CA;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C02F 1/32 (2023.01); C02F 1/42 (2023.01); C02F 1/70 (2023.01); C02F 103/04 (2006.01);
U.S. Cl.
CPC ...
C02F 1/325 (2013.01); C02F 1/42 (2013.01); C02F 1/705 (2013.01); C02F 2103/04 (2013.01); C02F 2201/002 (2013.01); C02F 2201/3223 (2013.01); C02F 2201/3228 (2013.01); C02F 2301/024 (2013.01);
Abstract
The invention relates to an apparatus for providing ultrapure water, in particular ultrapure water for use in semiconductor fabrication. This apparatus comprises at least one cylindrical reactor with an inner cylindrical shell, an outer cylindrical shell and a channel-like volume between inner shell and outer shell. According to the invention