The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Oct. 14, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Karuppasamy Muthukamatchi, Madurai, IN;
Akash Goyal, Karnataka, IN;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Disclosed herein are a vacuum robot, vacuum robot linkages that may enclose driving assemblies in a sealed environment configured to isolate at least a portion of the driving assemblies from the outside environment, and methods of operation thereof. Drive assemblies that may be enclosed in the sealed environment of the vacuum robot linkage may be infinite rotation driving assemblies that enable a robot link member to have a rotation of at least 360 degrees about an axis. The vacuum robot linkage environment may be sealed through a magnetic liquid rotary seal and/or through a fixed vacuum seal.