The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Mar. 10, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Paul B. Reuter, Austin, TX (US);
Sushant S. Koshti, Sunnyvale, CA (US);
Maureen Frances Breiling, Campbell, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 19/00 (2006.01); B25J 9/16 (2006.01); B25J 21/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B25J 19/0075 (2013.01); B25J 9/1679 (2013.01); B25J 9/1694 (2013.01); B25J 21/00 (2013.01); H01L 21/67766 (2013.01); H01L 21/67775 (2013.01); G05B 2219/40252 (2013.01);
Abstract
A factory interface includes a housing, a front surface of the housing having multiple load ports, a robot having an arm and an end effector, and a track attached to a floor within the housing. The robot is adapted to move horizontally along the track to multiple positions from which the arm can reach the end effector of the robot into a front opening unified pod attached to any of the multiple load ports.