The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Sep. 10, 2021
Applicant:
Daihen Corporation, Osaka, JP;
Inventor:
Jun Iura, Osaka, JP;
Assignee:
ROHM CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01);
Abstract
An aligner includes a first rotation drive mechanism, a second rotation drive mechanism and an elevation mechanism. The first rotation drive mechanism includes a first support portion that supports a workpiece, and a first drive source for rotatively driving the first support portion about a first vertical axis. The second rotation drive mechanism includes a second support portion that supports the workpiece, and a second drive source for rotatively driving the second support portion about a second vertical axis. The elevation mechanism is configured to move the workpiece supported by the second support portion up and down.