The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Sep. 09, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Hanish Kumar Panavalappil Kumarankutty, Bangalore, IN;
Steven D. Marcus, San Jose, CA (US);
Kirubanandan Naina Shanmugam, Bangalore, IN;
Sriharsha Dharmapura Sathyanarayanamurthy, Bengaluru, IN;
Madhukar Krishna, Bengaluru, IN;
Shivaprakash Padadayya Hiremath, Bangalore, IN;
Senthil Kumar Nattamai Subramanian, Hosur, IN;
Sankar Menon Cherubala Pathayapura, Bangalore, IN;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.