The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
May. 16, 2023
Applicant:
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Inventors:
Mike Armstrong, Loveland, CO (US);
John Accardo, Fort Collins, CO (US);
Daryl Frost, Windsor, CO (US);
Assignee:
Advanced Energy Industries, Inc., Denver, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32366 (2013.01); H01J 37/32128 (2013.01); H01J 37/32926 (2013.01); H05H 1/46 (2013.01);
Abstract
Generators and methods for igniting a plasma in a plasma chamber are disclosed. The generator includes an ignition profile generator that includes a data interface configured to receive a specification for voltage as a function of time and an ignition data generator configured to create an ignition profile from the specification. The generator also includes an ignition profile datastore to store the ignition profile and a waveform generator configured to apply a waveform with the ignition profile to an output of the generator.